2017 Varian E500 EHP

Varian Medium Current E500EHP

OEM/Model: E-500 EHP

Year of Mfg: 2017

Serial No.:

Software version: 15.10

Wafer size: 200mm

Training:

Two loader open cassette system YES

Two polished load locks and cassette nests

w/cassette detect switches YES

Roplat (mechanical) YES

Cooled rotating platen YES

Variable Delay Water Interlock NO

Accel suppression feedthrough YES

Type II EHP Bernas ion source w/ tungsten arc chamber YES

TVL Traveling faraday assembly YES

Lead and aluminum laminate floor YES

Touch screen control YES

Remote service monitor YES

Self compensating dose monitoring system YES

Auto interlock beam purity check YES

Interlocked software for auto regen YES

CCIG on resolving housing YES

High conductance post scan chamber YES

Cold Cathode Ion gauges YES

System Main Power: 3-phase 5 wire 208V 75KVA 60Hz

Source

4 bottle gas YES

Gas cylinder volume (liter) 4X Size

Ar (External or Internal) External (House-feed)

AsH3 cylinder type (HP or SDS) SDS

PH3 cylinder type (HP or SDS) SDS

BF3 cylinder type (HP or SDS) SDS

Gas line purge YES

Vaporizer P.S. NO

Dual vaporizer head and power supply NO

Non-reversible source magnet.

Beamline

Scan generator-30KV (Yes or No) YES

Mirror Beam Filter -60KV (Yes or No) YES

Automatic Graded Decel - Decel relay & P/S (Yes or No) YES

End station

Platform Type (Std. type or Productivity+) Productivity +

Clamp type (E or M-clamp) E-Clamp

Smoke Detectors (Yes or No) YES

Service Monitor (Yes or No) YES

1 GHz Computer / Rev15 Software YES

Wafer walk out YES

Roplat tilter YES

Cassette Pivot sensor YES

Cassette present YES

High altitude kit with lexan door shield NO

Graphite components YES

Solid State Scanner YES

Accessory

Source Turbo Pump Type Seiko Seiki / STP1000C

Analyzer Turbo Pump Type Seiko Seiki / STP300

Beamline Turbo Pump Type Seiko Seiki / STP1000

Source Rough Pump Type Edward / iQDP40 or Ebara

Stage Pump Type Scroll pump/venturi

End station Pump Edward / iQDP40 or Ebara

Target Cryo Pump Type CTI

Target Cryo compressor Type CTI 9600

Load lock Pump Type Turbo

Remote PD NO

High voltage beam energy probe YES

Machine specification

Rolpat Housing (Upgraded with Flat Cable)

Roplat cable Flat Cable

Tilter Motor Roplat/Tilter Upgraded

Tilter Assy Roplat/Tilter Upgraded

Orienter stage (part of WH II Upgrade)

Electron Flood Gun YES

Trek amplifier YES

Extraction PS YES

Mirror PS YES

Decel Auto Decel w/N2 Feed

Pump Location Subfab or FAB

Source Bushings YES

Options

High purity N2

(0.01um N2 Filter w/SS tubing purity) YES

Energy probe YES

Metal reduction kit YES

Hall Probe NO

Eclamp flat cable NO

Host SECS II YES

Beam purity check software YES

Productivity Plus YES

Spare source YES

Light tower YES