1996 Semitool 1-Chamber Spray Acid Tool (SAT)

Manufacturer:Semitool

Model:Spray Acid Tool (1-chamber, 300mm)

Vintage:N/A

Max Wafer:300mm

System Dimensions:59 x 40 x 74 inches

Configuration:

1-Chamber SAT, 300mm capable, 1 heated tank, 1 fill vessel

MODEL: SAT1100S1PSHU

DETAILS:

SEMITOOL 1-CHAMBER 300MM SPRAY ACID TOOL (SAT) consisting of: 

- Model: SAT-1100S1PSHU

- Spray Acid Tool (SAT)

- Single Chamber

- Up to 12"/300mm Capable

- Capacity: Single 25-Wafer Cassette, 300mm wafers

- 1 Pneumatic Trebor 610 Pump for chemical delivery

- 1 Hot DI Water Loop

- Capable of bulk fill hook-up (external)

- Front and rear Touch Screen Interface

- Emergency Off (EMO

- System Power: 208V, 3PH, 40Amp, 50/60Hz

CONDITION:

As-Is / Where-Is Condition.