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1993 Axcelis/ Eaton Nova NV-GSD-A-160
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I-NOVA-A08 Hi-Current 2 available
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1996 Axcelis/ Eaton Nova NV 8200 Implanter
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8" - Energy config.: from 3 to 250keV (single); up to 750 keV (triple) - Wafer size 200mm with ...
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