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2001 Shibaura μASH8100
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Vintage: 2001 (1) 2000 (4) Wafer size: 8" (5) Configuration overview: 2ch (5) Process overvi...
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Shibaura CDE300
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CDE301 Plasma Etch Tool for SI Grieß, SNIT, Imid, Titan, Tungsten Wafer Size Range Minimum 300...
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