Tegal 901 (Poly) etch WAFER SIZE: 6

Single chamber silicon nitride etcher. Status: In Storage 8" Single chamber silicon nitride etcher Wafer S...

Equipment Make: Tegal Equipment Model: 981 Type: Etcher Wafer Size: 8" Equipment Configuration: S...

Used working RF match Please inquire for details

Wafer Size: 6.0

Tegal Plasma Asher Model 965 Refurbished TEGAL 965 PLASMA ASHER ALUMINUM CHAMBER FOR UP TO 6" WAFERS