PCB ASSY DOOR STATUS INTERLOCK

DC POWER SUPPLY

HEAT EXCHANGER

LOGIC INTERFACE ASSY

CONTROLLER

MONITOR ASSY

PCB ASSY LOAD LOCK INTERFACE

POWER CAP ASSY,SOURCE MAGNET,TERMINAL

POWER SUPPLY ASSY ACCEL STACK

FLIP MOTORS

WAFER CONTROLLER

VAC GUAGE CONTROLLER AND OTHER UNIT