Wafer Size: 6 inch THEIS 903 DRY ETCH OXIDE SF6-N2-CHF3-He-O2 Mass flow UNIT UFC1100A tegal3 O2 5...

SVG 8600 - COAT/DEVELOP RESIST TRACK

Wafer Size: 6 inch WET BENCH RCA Condition: New , unused.

Stainless Steel for Solvent Used for parts cleaning WET BENCH

Wafer Size: 6 inch TEGAL 901 DRY ETCH Poly/SiNSiC Gases used; SF6-N2-CHF3-He-O2 Mass flow UNIT UF...