2008 Kurt Lesker SPECTROS deposition system with 4-pocket E-beam gun, 3 Thermal sources and load lock
2008 Kurt Lesker SPECTROS deposition system with 4-pocket E-beam gun, 3 Thermal sources and load lock
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Description
Date of manufacture 12/2008
Power requirements: 230v, 32 amps, 1 phase, 50/60hz
SIGMA software running on Windows XP platform
Edwards XDS10 scroll pump
leybold ITR90 vacuum gauge
CTI 8 cryopump with 8200 cryo compressor on main chamber
Load lock with Pfeiffer TMH 521P turbo pump
3 Thermal evaporation sources with shutters
Quartz crystal film thickness monitors (3)
E-beam 4 pocket gun - evaporation source
100mm rotating substrate holder
Previous usage: gold and silver evaporation
Automatic Organic material evaporation with Sigma software
Specifications
Manufacturer | Kurt Lesker |
Model | SPECTROS deposition system with 4-pocket E-beam gun, 3 Thermal sources and load lock |
Year | 2008 |
Condition | Used |
Stock Number | BM1220 |