2007 AMAT UVision 200S

AMAT UVision 200S

Vintage 2007

300mm

As-is

The AMAT

Uvision SP 200 is a BF (Bright Field) wafer inspection tool

It is designed to inspect pattern wafers, but it can also inspect bare

and unpatterned wafers

Ligth source: Laser ( 26= 6 ג nm)

Tool scans a wafer in a meander path

Die to Die ” and Cell to Cell ” comparison capability

Can use reflected --( BrigthField ) and scattered signal (GF = GreyField )

in parallel for detection

On pattern wafers capable of detecting defects of 25 nm with 90 %

Capture Rate (Data from D&E recipe,