Entrepix Ontrack DSS200 - CMP Scrubber

General Description The Entrepix DSS-200 Series II is a high-precision, double-sided wafer scrub and clean system, optimized for Post-CMP (Chemical Mechanical Planarization) applications and high-efficiency substrate cleaning. The system delivers a complete wafer scrub, rinse, and dry cycle.

1. Substrate Capability & Handling

 Wafer Configuration: Currently configured for 200mm (8") wafers. Note: The system architecture remains compatible with conversion kits for 100mm (4") and 150mm (6") wafer sizes.

 Wafer Thickness Options: Compatible with 600, 800, 1000, and 1200 Micron

thicknesses.

 Robotic Transfer: Automated edge-gripping wafer transfer system, ensuring

zero contact with the active wafer faces during movement to the dry output

station.

 Handling Gripper: Equipped with a standard 5-Finger Wafer Gripper.

2. Process Station Configuration

 Input Station: Equipped with an input station (wet or dry option).

 Dual Brush Scrub Stations: Two double-sided scrub brush boxes featuring

Through-the-brush chemical dispense technology for uniform and optimized

chemical delivery.

 Spin Station / Dry (SRD): * Molded Spin Sink.

o Precision heated lamp assist dry system.

 Fluid Management: Upgraded DI / Acid Dispense Module.

3. Automation, Software & Control

 Control System: Advanced network control architecture incorporating

expandable I/O addressing and upgraded drive/stepper motor controls.

 Main Controller: Intel NUC computer operating on a Windows 7 system

platform.

 User Interface (HMI): Accessed via a color flat panel touch screen display,

providing full access to process parameters, maintenance menus, and

hardware troubleshooting.

 Tracking & Security: Real-time on-screen wafer tracking, constantly updated

alarm status screens, and password protection with user keystroke tracking.

 Factory Automation: Fully evaluated and verified SECS/GEM software

interface.

4. Hardware & Safety Features

 Chassis Materials: Factory Mutual FM4910 approved plastics utilized for all

major assemblies (stringent cleanroom fire and chemical safety standards).

 Electrical Enclosure: 220VAC UL Listed and CE marked electrical enclosure.

 Consumables: 100% compatible with legacy industry consumables (PVA

brushes and silicone belts).