1997 LAM Alliance (A6) TCP 9600PTX
1997 LAM Alliance (A6) TCP 9600PTX
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Description
Metal Etch
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 1997-01-01
Currently Configured for: 200mm
Alliance A6 Platform
x2 9600PTX Chambers
x2 Microwave Strip Chambers
Specifications
| Manufacturer | LAM |
| Model | Alliance (A6) TCP 9600PTX |
| Year | 1997 |
| Condition | Used |
| Stock Number | MBM28 |