1997 LAM Alliance (A6) Exelan HPT
1997 LAM Alliance (A6) Exelan HPT
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Description
Dielectric Etch
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 1997-01-01
Currently Configured for: 200mm
Alliance A6 Platform
x2 Exelan HPT Chambers
x1 4520 Chamber
Specifications
| Manufacturer | LAM |
| Model | Alliance (A6) Exelan HPT |
| Year | 1997 |
| Condition | Used |
| Stock Number | MBM29 |