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2008 KLA-Tencor EDR 5200 SEM
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Tool Status Disconnected Wafer Size 300 mm Fab Section Metrology Model EDR 5200 Vintage 2008 ...
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2000 KLA Tencor AIT II
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4 available 200mm KLA-Tencor AIT II w/ ADC. Defect Inspection Vintage: 2000 (3) 2009 (1)
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2006 ASML PAS 5500/100D i-Line Stepper
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200mm Manufacture Date: 2006-10-15 HDD Status: Included – With Software Recent Performance Dat...
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2006 KLA-Tencor Viper 2435
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Vintage: 2006 Process: Inspection tool Tool status: Disconnected Software version: Windows CI...
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1997 Tokyo Electron Ltd. (TEL) ALPHA-8S ATM OXIDE
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Vertical Furnace Furnaces/Diffusion Systems Date of Manufacture: 1997-12-31 Currently Configur...
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Tokyo Electron Ltd. (TEL) ALPHA-8S ATM OXIDE
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Vertical Furnace Furnaces/Diffusion Systems Currently Configured for: 200mm Install Type Throu...
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2009 KLA SUN Microsystems
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Offline defect review station
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2013 KLA SpectraShape 9010
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300mm
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KLA AITXUV
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5 available 300mm Vintage: 2006 (2) 2005 (3)
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2014 Jeol JEM ARM-200CF
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Transmission Electron Microscope
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2007 HSEB MMT300 V2
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300mm
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2007 HSEB MMT 300
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300mm
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