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Used CARL ZEISS AXIOVERT 200M MAT

Process: microscope Condition: as is Wafer size: multi

Used AMAT Centura 2 DPS POLY

Used 2001 Hitachi Kokusai VR120/ 08S

Process: resistivity measurement Wafer size: 12" Condition: as is

Used SVS MSX-1000

Process: lift off M/C Condition: as is Wafer size: 4"

Used 2009 SEMILAB WT-2000PVN

Process: lifetime measurement Condition: complete

Used BMR HiEtch-LX200

Process: ICP etcher Wafer size: 12" Condition: as is

Used 1999 Tel ACT 8

Wafer size; 8" Process: track Condition: part tool

Used

WAFER SIZE: 150mm

Used 2002 DNS 80B

Condition: as is Wafer size: 8" Process: track

Used AMAT P5000

Process: Preclean Etchx1, Oxide CVD x2 Condition: as is Wafer size: 8"

Used ASML Yieldstar-S1250

Process: Overlay Measurement Condition: as is Wafer size: 12"

Used 2004 Rudolph AXI-S

Process: Macro Defect Inspection Condition: as is Wafer size: 12"