2009 Tel TELINDY Plus ALD HighK
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Description
Vertical furnace
Wafer size: 300mm
Asset HDD not included
System in currently running in the cleanroom.
HIK Process
Software Version : V6.07 Rev.002 (i00900-00005)
System Power Rating: 480V AC 3-Phase
Loading Configuration : 5 loader
Specifications
Manufacturer | Tel |
Model | TELINDY Plus ALD HighK |
Year | 2009 |
Condition | Used |
Stock Number | BM865 |