1994 Mattson Aspen II

Mattson Aspen II ICP Dual chamber.

ICP System, 8"

MATTSON Endpoint detection system

With fixed filters: 430 and 520

Cable length: 19 ft

(3) RF Cables and signal cables

(2) Heaters

MFC

Chambers:

Back chamber:

366 MHz CPU: Analog in and PCB out 

Floppy Disk Drive (FDD): DI/DO Cards

Chassis: Power supply

Gas channel: Bottom feed channel 

Cool down station: No water cooling

Gas lines

Right chamber:

366 MHz CPU: SEC II Card

Floppy Disk Drive (FDD): Robot stepper (SMC-PC3)

Chassis: Backing plain

Gas channel: Junction box

Cool down station: Lexan plates

Gas lines with filters

Front end:

26" Opening with separate operator interface

4-Color light tower

Operator / Engineering monitor: TFT Design monitor

Gas box with sub frames

EMO Buttons

Interlock circuit: Push button switches

Hanging panels

Load lock:

Single load lock

(2) Cassette stations

Capability of queuing lots

Pin search assembly: Proximity sensors

Load lock seal: Lip seal

Platform and cassette: 

(4) 25-Slot cassettes

Rotating cassette nests, 8"

Cool down station: Flat cool down station without water lines

Load lock fast exchange

Transfer robot:

Main robot: 3-Axis robot with flex cable

Robot arm: (4) Adjustable paddles with standard arm

Slit door

Wafer sensors: Paddles, front and rear cassettes

Shuttle: 26" 

Process module:

Chamber right and back:

Tube type: Quartz tube

Standard process window

ICP Chamber O-ring type: Flurosilicon

Temperature controller: WATLOW 988 / EZ Zone

Thermal couples: Spring loaded TC

Lift pin assembly

Grids / Guide rings: Extended guide ring

Electrical feed through

Manifold and ceramic parts

Isolation valve

Top plate

Load lock

Chamber

Pressure controller:

VAT Valve pressure controller

Chamber manometer: 10 Torr

Load lock manometer: 100 Torr

Shuttle manometer: 1000 Torr

RF / MW System:

RF System: Top RF 13.56 MHz

(3) RFPP10 RF Generators: (2) Power cables missing

TRAZER AMU 10D-2 RF Top match, P/N: 914-92003-00: (2) Vacuum capacitors missing

Re-silvered RF coils

(125) RF Vacuum caps: 100PF

AC Box: 2-3 Phase generators with safety cover

DC Box

Gas system:

Gas VCR gasket: Stainless steel and Nickel

Gas line / Gas / Range

Gas 1 / O2 / 1000 SCCM

Gas 2 / N2 / 1000 SCCM

Gas 3 / N2/H2 (4%) / 2000 SCCM

Gas 4 / CF4 / 100 SCCM

Side:

Gas 1 / O2 / 5 SLM

Gas 2 / N2 / 1 SLM

Gas 3 / CF4 / 200 SCCM

Gas 4 / O2 / 1 SLM

Rear:

Gas 1 / O2 / 10 SLM

Gas 2 / N2 / 1 SLM

Gas 3 / CF4 / 200 SCCM

Gas 4 / O2 / 1 SLM.