NANOMETRICS Nano 8000X

As is

6"

The tool is now configured for 8’’wafer for most of Ox films and photo resister film. It comes with Kensington WFH4D robot and wafer stage system. The SE detector is included. The tool can also be configured for 6, 5, 4, 3 and 2 inch wafer. But transparent wafer is not computable due to the wafer aligner limitations.