Zeiss/HSEB Axiospect 300 Automated Wafer Inspection and Review station for 200mm/300mm wafers

Wafer inspection/review station for bare and patterned wafers

Inspect 300mm wafers in FOUP loaders or 200mm wafers in open cassetes with adaptors

2 FOUP loaders

Axiotron 300 microscope

Equipe robot with PRE-5120 prealigner

300mm wafer chuck with 300mm x 300mm xy stage

DIC, brightfield, darkfield

objectives: Epiplan Neofluar 2.5 HD, Epiplan Neofluar 10,20,50 HD DIC, Epiplan Apochromat 100 HD DIC

xenon light source with fiber cable

Windows NT operating system with SmartVIEW ver.4.13 software for visual inspection and defect classification,

wafer mapping, file management, image handling and processing.