PlasmaFinish V55-G microwave ashing system

Vacuum chamber 340 x 400 x 450mm

Door with auto unlock feature after end of process

Microwave excitation 2.45GHz magnetron, maximum adjusted power 1200W

3 gas channels with Brooks MFC: N2, Ar, O2

Pfeiffer DUO65C vacuum pump with Fomblin oil (PFPE)

Pressure gauge: Baratron absolute transducer

PLC process controller with RS232

Power req: 230/400VAC, 3 phase, grounded, 50/60hz