Karl Suss PA200 semiautomatic prober with temperature controlled 200mm chuck and dark chamber
Karl Suss PA200 semiautomatic prober with temperature controlled 200mm chuck and dark chamber
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Description
Suss Microtech PA200 semiautomatic prober
Dark chamber
Motorized microscope mount with 50mm (2") XY travel and pneumatic lift
Mitutoyo FS-60 microscope with Plan APO 2/10/20/50x objectives
DC servo driven wafer stage with linear encoders
Rigid platten with vacuum manifold
Temperature controlled 200mm vacuum wafer chuck
Temptronic controller and TPO-3000A cooling unit
Specifications
| Manufacturer | Karl Suss |
| Model | PA200 semiautomatic prober with temperature controlled 200mm chuck and dark chamber |
| Condition | Used |
| Stock Number | BM1187 |