2008 Kurt Lesker SPECTROS deposition system with 4-pocket E-beam gun, 3 Thermal sources and load lock

Date of manufacture 12/2008

Power requirements: 230v, 32 amps, 1 phase, 50/60hz

SIGMA software running on Windows XP platform

Edwards XDS10 scroll pump

leybold ITR90 vacuum gauge

CTI 8 cryopump with 8200 cryo compressor on main chamber

Load lock with Pfeiffer TMH 521P turbo pump

3 Thermal evaporation sources with shutters

Quartz crystal film thickness monitors (3)

E-beam 4 pocket gun - evaporation source

100mm rotating substrate holder

Previous usage: gold and silver evaporation

Automatic Organic material evaporation with Sigma software