VAT Transfer valve for loadlock chambers series -075

Factsheet

Inside diameter (ID) in mm (inch): 50x336 (1.97"x13.2")

Flange: door; perpendicular mounting surfaces

Body material:Aluminum

Actuator: Pneumatic actuator with position indicator without solenoid valve double acting

Solenoid: No

Position indicator:Yes

Pressure min: .1•10-9 mbar

Pressure max: .1.0 bar (abs)

Feedthrough: Shaft feedthrough

Sealing technology: L-VAT

Sealhead Description: none

Sealing materials: FKM (VITON®)

Max. differential pressure closed position in bar: 1.0 / 0.1

Max. pressure on seat side during opening in bar: 0.1

Compressed air pressure max. in bar: 7

Compressed air pressure min. in bar: 4

Volume of air cylinder in l: 0.25

Closing or opening time in sec.: 1

Valve body temperature max. in °C: 150

Actuator temperature max. in °C: 80

Position Indicator temp. max. in °C: 80

Weight in kg / lbs: 5.2 / 11.46