2008 Suss Microtec GAMMA CLUSTER

Spincoater module / back cleaning: 1

Spraycoater modules: 1

Developer Module: 1

HMDS Chamber: 1

Hotplates: yes

Coolplates: yes

Control panel

Systems PC (Windows 7)

Loadports

Sankyo robot

HMDs tool

Slot centering tool

Media cabinets

Pressure control

Media cabinet- tank system

Temperature control