Trion Technology MiniLock II

Equipment Make: Trion Technology

Equipment Model: MiniLock II

Type: Plasma Etch Reactive Ion Etcher (RIE)

Equipment Configuration: – Electrical Specs: 208VAC 3 Phase

– Operational Status: Powered on, Software booted

– The unit requires a passcode for the Hardware & Maintenance menus, but the passcode is unknown

– Advance Energy RFX 600A RF

– Plasma Generator

– MKS 153 Control Valve

– VAT 02110-BH24-0001/0039 / A-358183 Rectangular Gate Valve

– Gas Cabinet with six Unit Instruments – Mass Flow Controllers

– Four of the Mass Flow Controllers are model UFC-1800 (Gas: N2, two 100cc, and two 250cc), two are model UFC-1660 (100cc BCl3, and 100cc CL2)

– The six gas lines are labeled “CF4,” “O2,” “BCL3,” “CHF3,” “SF6,” and “CL2.”