2015 AMAT DPS II MESA
2015 AMAT DPS II MESA
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Description
EFEM: Kawasaki ATM Robot
Buffer chamber : NO VHP robot
4 Process chamber (3x DPS II, 1x Axiom)
RF Gen rack ( Paramount 1513 and Paramount 6013)
AC rack
Category: Etch
Maker: AMAT
Model: DPS II MESA
Wafer Size: 300
Process: Poly
Missing Parts:
3x DPS II chamber, 1x Axiom chamber, RF rack, AC rack
( Missing: EFEM, VHP robot, Turbo pump)
Specifications
Manufacturer | AMAT |
Model | DPS II MESA |
Year | 2015 |
Condition | Used |
Stock Number | BM1635 |