2015 AMAT DPS II MESA

EFEM: Kawasaki ATM Robot

Buffer chamber : NO VHP robot

4 Process chamber (3x DPS II, 1x Axiom)

RF Gen rack ( Paramount 1513 and Paramount 6013)

AC rack

Category: Etch

Maker: AMAT

Model: DPS II MESA

Wafer Size: 300

Process: Poly

Missing Parts:

3x DPS II chamber, 1x Axiom chamber, RF rack, AC rack

( Missing:  EFEM, VHP robot, Turbo pump)