LAM Torus 300LP
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Description
Category: Etch
Maker: LAM
Model: Torus 300LP
Wafer Size: 300
Process: Etch
Config
3 Bevel Etch chamber system
Specifications
| Manufacturer | LAM |
| Model | Torus 300LP |
| Condition | Used |
| Stock Number | BM1641 |