JUSUNG Cyclon Plus
JUSUNG Cyclon Plus
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Description
Category: CVD
Maker: Jusung
Model: Cyclon Plus
Wafer Size: 300
Config
Brooks Back bone. No Process Chamber.
Brooks ATM Robot: 002-7090-04
Brooks Cotroller: 119368
Armset.
NO Mag 7 robot.
NO 300mm Load Port.
NO AC Rack
Specifications
| Manufacturer | JUSUNG |
| Model | Cyclon Plus |
| Condition | Used |
| Stock Number | BM1643 |