AMAT Axiom Chamber
AMAT Axiom Chamber
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Description
Category: Etch
Maker: AMAT
Model: Axiom Chamber
Wafer Size: 300
Process: Ashing
Config
Axiom, Ashing chamber
Specifications
| Manufacturer | AMAT |
| Model | Axiom Chamber |
| Condition | Used |
| Stock Number | BM1648 |