2011 FRT Microprof 200 TTV MHU 4 measurement tool

FRT MPR200 TTV MHU 4 Film Thickness measurement system

• Vacuum wafer chuck for 150mm and 200mm wafer
• CWL spectrometer 4kHz
• CWL 600µm sensor
• CWL FT (10µm) sensor head
• MHU (wafer handing unit) for 150mm and 200mm Semi standard wafer
• Prealigner
• Acquire Automation XT software packages:
• Film thickness;
• Step height;
• Bumps measurement (height, coplanarity, diameter); Roughness; 

Please note that this tool doesn’t have TTV (total thickness variation) function.