AMAT P5000

As is

200mm SILANE

Process Gases: SiH4, NH3, N2O, HE, CF4, AR, N2

Stand alone setup

Slit Valve Type: S Slit

Slit Valve Opening: Kalrez

Lamp module: Standard

Heater window: Quartz

Endpoint detector

Cluster throttle valve

VCR Manometer

RF Frequency: Single

Susceptor

Metal wafer lift

Downstream Plasma Apparatus

50Hz

Software version 4.26

(2) stand alone monitors

SMIF, 8 slot elevator