TEL ALPHA -8(AP)

Process ALLOY

Wafer Size 200mm

Process Wafer Qty 126

Process Type ALLOY

I/O Port / Smif I/O port

Load Lock NO

Carrier Slot 25 Slot

Boat type Single

System Controller PS4100Z

Operation Screen Touch Screen

Gas Flow Chart (Fornt & Rear) ◎ ◎

Temperature Controller M120

Vacuum Pressure Control N/A

Controller Transformer 1Φ 208V

Heater Transformer 3Φ 208V

Oxygen Analyzer N/A

HEC Pyro Ctl N/A

Process Gas 1 PN2

Process Gas 2 FO(4%H2/N2)

Basic Style Conventinal

Tubing Matrial SUS-316L

Tubing Finish VCR

Manual Valve N/A

Air-Operated Valve Fujikin

MFC Aera

Air-Operated Valve Type VCR Connect

Main Valve Fujikin

Casstte Storage Qty 16

Wafer Transfer Type 1

Fork Matrial Ceramic

Fork Qty 1

Heater Type VMM-35-001

T/C Type 5

Spike T/C 5