2010 LAM Rainbow 4420

Wafer Size : 6"              

EMO Button Guardrings : Yes

Software Version : Envision

Quantity of Monitors : 1 / CRT

L/L Robot : Hamonic Drive  

L/L Robot Blade :      AL

System Pump Package :    EDWARD             

Chamber Pump :  IQDP80/QMB500   (OPTION)

Loadlock Indexer Type :  Hine 38A Indexers              

L/L Pump : IQDP80   

Quantity of Generator Racks : 1              

Quantity of Chiller : 1/COSAM

Chamber Configuration:

Chamber Position: Single    

Chamber Type: STANDARD    

Process:  PLASMA CLEANER    

System Controller: 32Bit Microprocessor with CRT    

Version: Envision    

Chamber Body: AL Anodize    

Source Type: Plasma System    

RF POWER: OEM-12A    

Endpoint: Photodiode Optical    

Pressure Control: AC2    

Temp Control: Chiller    

Chuck Type: Mechanical    

Match: Menual    

Process Gas:       

O2 100 sccm - 1 - Unit - UFC-1200

O2 300 sccm - 1 - Unit - UFC-1200