2011 KLA-Tencor Uvision 5

Tool status: Cold Shutdown 

Software version: 788

CIM: E84, SECS/GEM, GEM300 

Hardware Configuration (fab):

Main system: Bright Field Wafer Inspection System - 1

SMIF system: 300mm G1 Load Port - 2

Moving Omron V640 - Carrier ID Reader - 2 

Handler system: OHT Sensor DMS-HB1-Z - 2

IBA and Virtual Recipe Recipe Computer - 1

Tool Emulator - 1

Options: Ionizer for ASYST - 1

Missing/Faulty Parts / Accesorries List:

1.Stage controller

2.Zygo controller

3.Pre turret Y ministage

4.Swift cage

5.GF CLC unit

6.Zygo laser head

7.PDU to EPDU 24v power cable

8.AWG wave generator