Brooks Jet System Front End Module (EFEM)

• 2 EFEMs (1 new, 1 slightly used)
• Both are standard with 300 mm wafer cassette ports
• 1 Conversion wafer port for 100 mm wafers
• 1 TDK Wafer Port

The Brooks Automation Jet™ system is an Equipment Front End Module or EFEM. It is the link between the factory’s Material Transport System and the Process Tool.