1993 Gasonics L3200 Asher

4", 6"

- 2 quartz vacuum chambers

- RF power supply

- Mass flow controlled gas delivery system

- Roughing pumps and pressure control systems (throttle valves)

- Electronics control system

- Automated robotic wafer handler

- The Asher employs two modes of process termination – end point detection and end of process time

- Missing Robot - can be run by manually loading chamber 1 wafer at a time

1993 Vintage