SPEC Wafer Plating

ECD (Electro Chemical Deposition)

Deposition Equipment

Currently Configured for: 300mm

Asset HDD not included

Tool layout(s): Left to Right, Reference SO 6262 with Chemical Cabinets supplied (Isoports on left front). Right to Left, Reference SO 6263 without Chemical Cabinets (Isoports on right front) - Qty 1

Hepa Filtration: Bottom removable: Fan powered - Qty 1

Bulkhead capable: Rear Service - Qty1

Exhaust:Adjustable Baffles - Qty 1

Drip Pans: Full under chemical modules: ramps between baths.- Qty 1

DI Hand Spray: Integrated bypass with quick disconnect -Qty 10

Transfer system: n/a

Automation: ALT Series Automation (Include the latest upgrade from IMFT tools.) - Qty 1

Speed: <= 6 seconds tank to tank - Qty 1

Carriers: Teflon - Qty 9 Ea

Station Control: n/a

PLC: SPEC Series 7 - Qty 1

Auto recover: Automatic recovery of wafers due to lockup or power fluctuation. - Qty 1

Touch screen: Dual one at load/unload, one at rear - Qty 1

Display: English - Qty 1

PC Host Interface: Wonderware intouch HMI (Include the latest upgrade from IMFT tools.) - Qty 1

Host requirements: Micron TAR ver 1.5 compliant. - Qty 1

Atotech Pd analyzer: Hardware and Software capability to interface - Qty 1

GUI interface: Windows 98

Upgrade to xP by Jan 2007 (Windows XP) - Qty 1

Binary Recipe Download: YES - Qty

Binary recipe format: Provided by supplier - Qty 1

> 10 GB log storage: Real time data acquisition of Analog/Digital I/O - Qty 1

USB Ports: Minimum of 2: Capable of recipe storage/transfer - Qty 1

Factory Interface:

Manufacture: Asyst Technologies - Qty 1

FOUP / Cassette - Part Number: Entegris F300 - Qty 1

Wafer Diameter: Wafer Diameter : 300 ± 0.25mm - Qty 1

Wafer Pitch: Half Pitch - Qty 1

Wafers Direction: Rear ? Front - Qty 1

Number of FOUP: 2 - Qty 1

Wafer Mapping capability: ASYST - Qty 1

AMHS: MTV: N/A. Lehi: OHT or manual delivery - Qty 1

Online: GEM 300 - Qty 1

Bottle Fed Chemicals - Qty 1

Bottle 1 Ronamerse SMT: 20 Liter - Qty 1 Ea

Bottle 5 Everon BP Replenisher: 1 Gallon - Qty 1 Ea

Bottle 6 Everon BP Reducer: 1 Gallon - Qty 1 Ea

Bottle 4 Everon BP Accelerator: 1 Gallon - Qty 1 Ea

Bottle 3 NH4OH: 1 Gallon - Qty 1 Ea

Bottle 11 10% Pd/Cl: 1 Gallon - Qty 1 Ea

Bottle 2 & 7 20% H2SO4: 1 Gallon - Qty 2 Ea

Bottle 8 NaOH: 20 Liter (DOC2 change to 1 Gallon) - Qty 1 Ea

Bottle 10 & 14 Xenolyte Pd Makeup: 20 Liter - Qty 2 Ea

Bottle 9 & 13 Xenolyte Pd Reducer: 20 Liter - qty 2 Ea

Bottle 12 Xenolyte Pd Replenisher: 20 Liter - Qty 1 Ea

Level sensors: Low level (Use N2 for all level bubbler sensors.) - Qty 14 Ea

Distribution Manifold: n/a - Qty 14 Ea

Distribution Pump: Yamada - Qty 5

Spiking Pump: Iwaki - Qty 8

Spiking Pump Accelerator: Saint Gobain - Qty 1

Bulk Chemical Interface:

Line-1: MAE - Qty 1 Ea

Line-2: Nitric Acid - Qty 1 Ea

Line-3: H2SO4 - Qty 1 Ea

Line-4: DIW - Qty 1 Ea

Line-5: Hot DIW - Qty 1 Ea

Line-6: Chilled Water - Qty 1 Ea

Line-7: Chilled Water - Qty 1 Ea

External Exhausted Chemical dispense:

Included: Included in Left to Right Configuration

Drum 1: 55 Gallon - Qty 1 Ea

Drum 2: 55 Gallon - Qty 1 Ea

Drum 3: 55 Gallon - Qty 1 Ea

Level sensors: Low level - Qty 3 Ea

Distribution Manifold - Qty 3 Ea

Distribution Pump: White Knight

Nitric Acid Reservoir

Material: PVDF Construction - Qty 1 Ea

Pump: Yamada

Level Sensor: Overfill and low (Close to front of the tool location for easy maintenance access)

Drain: From Ni tank to reservoir: From Reservoir to Heavy Metal

Station 13: IPA Vapor Dry - Qty 1

Bath Name: IPA Vapor Dry

Material: 316 Stainless

Temperature Control: Heated (150C process capability)

Over Temp Protection: WATLOW

Manifold:

IPA autofill: Capable

Supply canister: 20 Liter with Q.D (not supplied by SPEC)

Drain:

Aspirated Drain 10:1 (pump out): Solvent waste

Gravity: Solvent waste

Lid: I.W.

Station 12: Dry Product Transfer Stage Position - Qty 1

Bath Name: Dry Product Transfer (Drain for DIW)

Product detection Sensor: Yes

Chemical: No

Station 11: Quick Dump Rinse Bath - Qty 1

Bath Name: Quick Dump Rinse

Material: PVDF ( 4 Sided Non Sawto