2010 TEL TELINDY IRAD ALD High-K

Currently Configured for: 300mm

Asset HDD not included

Tool is now de-installed

The de-installation was performed by the OEM in November 2015.

Shipping brackets and kits will need to be supplied by buyer.

Missing or damaged parts: do not know if there are any. Please inspect to confirm.

Tube Material:Quartz

Boat Material:Quartz

Production wafes:100

Pressure control:APC Valve 

Process Gas:TEMAZ(F.S:1.0sccm),TMA(F.S:500sccm),O3(F.S:20slm,200g/m3),N2,OCTANE

Vaporizer Maker:STEC(TMA,TEMAZ)

Vaporizer TYPE:LSC-F700(TMA),TL-2011(TEMAZ)

MFC Maker:HITACHI-Metals

MFC Model:FCPAR78 series

Process Temp:200-300deg