2007 TEL Expedius+

Asset HDD not included

Tool is in service in a clean room.

Application: Light Etch

Bath-1: DHF

   Operating: 20°C, HF (49%) / DHF (1:200, 1:500), circulation, 15 L/min

   Chemical spiking: auto concentration feedback

   Bath Material: PTFE

Bath-2: POU

   Operating: 70°C, NH4OH/H2O2

   DIW Shower (hot / cold)

   Bath Material: PTFE

   Megasonic: 950 kHz, 2400W (600*4)

Bath-3: POU

   Operating: 70°C, NH4OH/H2O2

   DIW Shower (hot / cold)

   Bath Material: PTFE

   Megasonic: 950 kHz, 2400W (600*4)

Bath-4: POU

   Operating: 70°C, NH4OH/H2O2

   DIW Shower (hot / cold)

   Bath Material: PTFE

   Megasonic: 950 kHz, 2400W (600*4)

Dryer: SD2 *2

   Operating: 49% DHF (1:200), IPA/N2 200°C, 100 L/min

   Resistivity monitoring (Horiba)

   Bath Material: PTFE