2007 AMAT Endura II Aluminum Interconnect

Currently Configured for: 300mm

Asset HDD not included

Tool is operating in clean room.

Shipping brackets and kits will need to be supplied by buyer.

Chambers:

[Chamber-C]

Process:PCXT

Gas(sccm)：Ar(200/20)

[Chamber-D]

Process:TiN

Gas(sccm)：Ar(150),N2(200) 

[Chamber-E]

Process:DEGAS

[Chamber-F]

Process:DEGAS

[Chamber-1]

Process:SIP-Ti

Gas(sccm)：Ar(50/20) ,N2(200)

[Chamber-5]

Process:SIP-Ti

Gas(sccm)：Ar(50/20) ,N2(200)

[Chamber-2]

Process:ALPS

Gas(sccm)：Ar(100/20) 

[Chamber-3]

Process:Hot-AL

Gas(sccm)：Ar(200/20) 

[Chamber-4]

Process:Hot-AL

Gas(sccm)：Ar(200/20)