DNS SU3000

300mm

Process Module

o Four (4x) Spin Units

o Spin Scrubber SPIN#1-4

 Spin motor

 Mechanical chuck (magnetic)

 DI water rinse

 Backside rinse

 PVC upper cup, PP lower cup, PVC backside rinse vat

 PP exhaust box

 Drainage

MHU (Main Handling Unit)

o MHU

o Double Hand 2 wafers gripper

ID Unit

o Three (3) load port with Ergonomic cassette rotation mechanisms

o WMS (Wafer Mapping Sensor) function

o PGV Interface Capability

o FFU

o Lockable electrical disconnect

Main controller/Station controller

o Main display: 14’ TFT color LCD with touch-panel

o Station display: 6.5’ TFT color LCD with touch-panel

o Main CPU; 32bit CPU Pentium233Mhz, 256Mbyte RAM, 6.4Gbyte hard disk, key board

o Station CPU; 32bit CPU Pentium166Mhz, 64Mbyte RAM, 40Mbyte Flash disk

Breaker Box

o Input: 3phase-3line and ground line,208V,50/60Hz

o Lockable disconnect

o UPS: 8.5kVA (0.5kVA:main controller,8.0kVA:DC power)

Nanospray cleaning

o Fluid: DI water and N2

Flow Rate Detection

o Detection Method: Detects position of flow rate measurement float.

o Detection Points

 DI rinse dispense flow rate

 Backside rinse dispense flow rate

 Brush rinse dispense flow rate

o Atmosphere Control

 ULPA filter

o eFlow Generator

o SC-1 Unit

 --Filter (0.05um)

o Spray Unit

 Mass flow controller: N2 flow rate is controlled by Recipe.