1993 AMAT P5000- Mark II

4 Chamber

Frame is refurbished/ chambers are AS IS condition

-. Wafer Size : 150mm

 -. Process Base : PE SiH4 Oxide

Main Frame

 -. HDD : SSD Type -. Main DC Power Supply : Working Confirm

 -. FDD : 3.5" SCSI Original Type / Working Confirm -. VME DC Power Supply : Working Confirm

 -. SW Version : B4.26 Installed -. VME Controller

 -. Cassette Indexer Type : Clamp / Working Confirm   1) Mini SBC BD

 -. Elevator Type : 8 Slot 150mm / Working Confirm   2) SV21 SBC BD

 -. Robot Type : AMAT Standard / Working Confirm   3) SEI BD

 -. Blade : 6" Standard / Working Confirm   4) AO-2 ( Expanded Gas Panel Up-Grade )

 -. I/O Sensor : Installed / Working Confirm 5) AI-2 ( Expanded Gas Panel Up-Grade)

 -. I/O Door : Installed / Working Confirm   6) VGA

 -. Centerfinder : Installed / ASIS   7) AO-1

 -. Cap Sensor : Installed / Working Confirm   8) AI-1

 -. Vacuum Sensor : Installed / ASIS   9)~12) Stepper Control BD

 -. Slit Valve : Standard / ASIS   13)~16) DI/O BD

 -. Foreline : Clean   17) Empty

 -. Electrical Controller    18) DI/O #06 BD ( Expanded Gas Panel Up-Grade )

 1) TC Gauge BD / 2ea   19)~20) Empty

 2) 12VDC Power Pack / 1ea

 3) 15VDC Power pack / 1ea

 4) -15VDC Power Pack / 1ea

 5) Buffer I/O BD / 1ea

 6) Opto I/O BD / 2ea

 7) Chopper Driver Power Pack / 4ea

 -. Monitor : CRT 17" with Table / 2ea

Process Chamber

-. Chamber Type : DLH One-Hole Standard / Used Install

-. Process : PE-SiH4 Oxide

-. Chamber Q'ty : 4(A/B/C/D)

-. Susceptor Type : 150mm AL Susceptor / Used Install / 4ea

-. Wafer Lift Type : 150mm Ceramic Hoop / Used Install / 4ea

-. Heater : Lamp Type / Used Install / 4ea

-. Lid Assembly : Used Install / 4 set

-. Water Flow Switch : Peoteus / Used Install / 4ea

-. HX Water Line : All Replaced

-. Throttle Valve : Cluster / Used Install / 4ea

 -. Process Kit : Used Install -. Isolation Valve : Nor-Cal / Used Install / 4ea

  => Pumping Plate / 4ea -. Lamp Driver : Used Install / 4ea

  => Ceramic Focus Ring / 4ea -. RF Match Box : Used Install / 4ea

  => Shower Head / 4ea -. Susceptor Lift Assy : Used Install / 4 set

  => Blocker Plate / 4ea -. Wafer Lift Assy : Used Install / 4 set

  => Heater Window / 4ea -. Wafer Lift Hoop : Metal Standard / 4 set

  => Bellows Susceptor / 4ea

  => Bellows Wafer Lift / 4ea

Componants

 -. Remote AC Rack : Shrink Type - Cleaned

 -. RF Generator : ENI OEM-12A / 4ea => ASIS

 -. Heat Exchanger : AMAT-0 => ASIS

 -. HX Seperate Manifold => ASIS

Gas Panel

 -. Gas Panel Type : Expanded 28 Channel Up-Grade Type ( New )

 -. MFC : Unit -1660 / 16ea => ASIS

 -. Manual Shut-Off Valve : Ch#A/B => Kits SCT / 8ea : ASIS Ch#C/D => Nupro / ASIS / 8ea

 -. Pnematic Valve : Nupro Bellows Valve / ASIS / 20ea

 -. Pnematic Control Panel : Expanded Pnumatic Panel Up-Grade Type ( New )