1996 AMAT P5000

Etch Mark II 3 Chambers, 8"

- 3 Mark II Etch Chambers (Resine/Arc, Oxyde, Nitrure, Silicium)

- ESC Chuck

- Remote Frame

- OEM 12B Generators

- Chiller not included

Issues:

- Chamber A: Last time used in March 2022 (stopped due to

ESC arcing)

- Chamber B: In production currently

- Chamber D: Last time used in August 2020 (was working)

1996 Vintage

※The tools are still installed, complete and working.