Muratec Murata Machinery, Ltd. SRC330

Wafer Stocker

Wafer Automation / Wafer Environment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

SRC330 VEHICLES.

Configuration: Audit to verify.

Wafer size:                       300mm

Carrier:                             300mm Carrier - SEMI E47.10

                                        (25 wafer) compliant.

FOUP ID Scheme:            RF ID on front of FOUPs,

                                        Per FOUP standard

Track Control Software:    IB SEM Compliance

Semi Standards:               E51.1, E84, E47.1, E57, SEMI S2, S8

Model:                              SRC330