TEL Tactras Vesta NV3

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 300mm

Available date: Currently Available

Main Frame

1 * Loader Module

3 * Load Port Unit

1 * Vaccum Transfer Module

1* Transfer Module

2*Loadlock Module

4 * Process Module​

4 * Process Module

PM1: Vesta NV3

PM2: Vesta NV3

PM5: RF-3

PM6: Vesta NV3

3 * HF RF Power Supply

4 * Gas Box

3 * RF Generators

3 * TMP Controller

Support Equipment

2 * AC Distribution Box