2010 TEL Trias K CVD sytem

CVD System, 12” <45nm process

Vintage 2010 2 Chambers: CVD & ALD

Process: NiOx, HfOx

Trias cluster: 2 Loadports LM: Front end

Main power distribution (MPD)

Transfer module, TM

EX reactor, PM2:

Plasma capability: No

Includes:

Ozonizer & H20 Box

2 Touch screens ozonizer

High-k CVD reactor PM4:

Thermal based deposition

Transformer box (Hi-K) option elec box:

Manuals & Spareparts included

The machine is in absolute as good as new condition ex R&D facility

PM2: Hafnium Nickel Titaan Vanadium

PM4: Hafnium Nickel Titaan Ruthenium Strontium