2006 AMAT Oasis clean

Vintage 2006

300mm

As is

Date of manufacture: 2006

Software revision: OA_B3.0_38

Configuration:

ChA Axiom (Dry strip)

ChB Tempest (Wet etch, NH4OH, H2O2, HF)

ChD Tempest (Wet etch, NH4OH, H2O2, HF)

Modules:

Mainframe

FI (Yaskawa robot)

Bulkfill Chemical cabinet

Rotary vacuum pump (for ChA)

Main AC box

Generator rack

Connection details: 208V 3fase 50/60Hz 240A