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KLA TENCOR INSPEX EAGLE

KLA TENCOR INSPEX EAGLE

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Description

Patterned Wafer Laser Inspection

Wafer Size: 150mm capable 4” up to 8"

Equipment Details: Wafer inspection system

Chuck, 6”

Prealigner, 6”

Cassette to cassette handling

(2) Ports

ZEISS Microscope

Including manuals

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Specifications

ManufacturerKLA TENCOR
ModelINSPEX EAGLE
ConditionUsed
Stock NumberBM2248