Lam Research 4520 RAINBOW GAS PANEL

Gas Panel for LAM Research 4520 Rainbow

Includes: Valves and MFCs.

 Included:

Unit UFC-1200A

Range 200 SCCM

Gas: CF

Unit UFC-1200

Range: 100 SCCM

Gas: CHF3

Unit UFC-1200A

Range: 50 SCCM

Gas: O2

Unit UFC-1200A

Range: 200 SCCM

Gas: Ar

USED