Lam Research 4520 RAINBOW GAS PANEL

Lam Research 4520 RAINBOW GAS PANEL

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Description

Gas Panel for LAM Research 4520 Rainbow


Includes: Valves and MFCs.


 Included:

Unit UFC-1200A

Range 200 SCCM

Gas: CF


Unit UFC-1200

Range: 100 SCCM

Gas: CHF3


Unit UFC-1200A

Range: 50 SCCM

Gas: O2


Unit UFC-1200A

Range: 200 SCCM

Gas: Ar


USED

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Specifications

ManufacturerLam Research
Model4520 RAINBOW GAS PANEL
ConditionUsed
Stock NumberGOD2308201975139382