2011 Genmark Porta300P

Genmark, Porta300P, 2 loadports

with some spare parts

Tool Status Disconnected

Wafer Size 300 mm

Fab Section Test

Asset Description Loadport

Software Version n/a

CIM none

Process Lab

Hardware Configuration (fab):

Main System Loadport 2

Handler System n/a

Factory Interface NONE

Options System n/a

Others spare linear indices 6

Others spare mapper cover 1

Others spare linear encoder 1