DNS 80A

Excellent refurbished condition.

MODULE: SYSTEM: RIGHT TO LEFT CONFIGURATION FOR SILICON WAFERS

CONFIGURATION: 4 CASSETTE STAGE

2 FRONT SIDE

2 BACK SIDE

MAIN BODY: MAIN CONTROLLER: NEC 9821X

INDEX ROBOT: CERAM C P NCETTE(VACUUMLESS)

MAIN ROBOT: 2FINGERS WAFER TRANSFER MAIN ROBOT(UPPER/LOW)

INDEXER: CASSETTE CARRIER STATION

25WAFER SLOTS CASSETTE

FRONTSIDE: sp N SERVO MOTOR

VACUUM CHUCK

JET NOZZLE (USE) DW R NSE            (USE)

BRUSH R NSE (USE)

BACK RINSE (USE)

N? PURGE (USE)

Digita vacuum sensors & Interlocked for spin unit

BACK SIDE: sp N SERVO MOTOR

MAGNETIC CHUCK

DW R NSE       (USE)

BRUSH R NSE (USE)

BACK R NSE (USE)

N2 PURGE (USE)

DIV/ F: o. IUM

SUB UNIT: AC POWER BOX: øl AC208V

MEGCON/ JET PUMP SOX: MEGCON RC-IOOOAD-T

EBARA PUMP TYPE

UTIL: FAC L D RECT SYSTEM: AIR / N2 / VACUUM / EXHAUS / DRA N